SELF-ALIGNED INVERSION-MODE INP MISFET

被引：6

作者：

OIGAWA, K ^{[1
]}

UEKUSA, S ^{[1
]}

SUGIYAMA, Y ^{[1
]}

TACANO, M ^{[1
]}

机构：

[1] ELECTROTECH LAB,SAKURA,IBARAKI 305,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 10期

关键词：

D O I：

10.1143/JJAP.26.1719

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1719 / 1721

页数：3

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