TRANSMISSION ELECTRON-MICROSCOPE STUDY OF ION AND ELECTRON-BEAM INDUCED STRUCTURAL-CHANGES IN A-GE0.25SE0.75 INORGANIC RESIST THIN-FILMS

被引：4

作者：

BALASUBRAMANYAM, K

CHEN, LJ

RUOFF, AL

WOLF, ED

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 08期

关键词：

D O I：

10.1063/1.331405

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5975 / 5978

页数：4

共 11 条

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