LASER SURFACE PROCESSING OF MOLYBDENUM-DISULFIDE THIN-FILMS

被引：16

作者：

JERVIS, TR ^{[1
]}

NASTASI, M ^{[1
]}

BAUER, R ^{[1
]}

FLEISCHAUER, PD ^{[1
]}

机构：

[1] AEROSPACE CORP,CHEM & PHYS LAB,EL SEGUNDO,CA 90245

来源：

THIN SOLID FILMS | 1989年 / 181卷

关键词：

D O I：

10.1016/0040-6090(89)90516-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：475 / 483

页数：9

共 15 条

[1]

BAUER R, UNPUB

[2] CORRELATION BETWEEN PROCESS CONDITIONS, CHEMICAL-COMPOSITION AND MORPHOLOGY OF MOS2 FILMS PREPARED BY RF PLANAR MAGNETRON SPUTTERING [J].

BICHSEL, R ;

BUFFAT, P ;

LEVY, F .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1986, 19 (08) :1575-1585

[3] MORPHOLOGICAL PROPERTIES OF SPUTTERED MOS2 FILMS [J].

BUCK, V .

WEAR, 1983, 91 (03) :281-288

[4] STOICHIOMETRY AND FRICTION PROPERTIES OF SPUTTERED MOSX LAYERS [J].

DIMIGEN, H ;

HUBSCH, H ;

WILLICH, P ;

REICHELT, K .

THIN SOLID FILMS, 1985, 129 (1-2) :79-91

[5] A SEMIAUTOMATIC ALGORITHM FOR RUTHERFORD BACKSCATTERING ANALYSIS [J].

DOOLITTLE, LR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :227-231

[6] EFFECTS OF CRYSTALLITE ORIENTATION ON ENVIRONMENTAL STABILITY AND LUBRICATION PROPERTIES OF SPUTTERED MOS2 THIN-FILMS [J].

FLEISCHAUER, PD .

ASLE TRANSACTIONS, 1984, 27 (01) :82-88

[7] EFFECT OF EXCIMER LASER ALLOYING OF TI ON THE SLIDING FRICTION OF AISI-304 STAINLESS-STEEL [J].

JERVIS, TR ;

HIRVONEN, JP ;

NASTASI, M .

JOURNAL OF MATERIALS RESEARCH, 1988, 3 (06) :1104-1107

[8] EFFECT OF EXCIMER LASER MELTING ON THE NEAR-SURFACE CHEMISTRY AND CORROSION PROPERTIES OF AISI 304 STAINLESS-STEEL [J].

JERVIS, TR ;

FRYDRYCH, DJ ;

BAER, DR .

MATERIALS LETTERS, 1988, 6 (07) :225-228

[9] IMPROVED TRIBOLOGICAL PROPERTIES OF SPUTTERED MOSX FILMS BY ION-BEAM MIXING [J].

KOBS, K ;

DIMIGEN, H ;

HUBSCH, H ;

TOLLE, HJ ;

LEUTENECKER, R ;

RYSSEL, H .

APPLIED PHYSICS LETTERS, 1986, 49 (09) :496-498

[10] FRICTION-REDUCING COATINGS BY DUAL FAST ATOM BEAM TECHNIQUE [J].

KUWANO, H ;

NAGAI, K .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1986, 4 (06) :2993-2996

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