KINETICS AND MOVING SPECIES DURING CO2SI FORMATION BY RAPID THERMAL ANNEALING

被引：30

作者：

LIM, BS

MA, E

NICOLET, MA

NATAN, M

机构：

[1] CALTECH,PASADENA,CA 91125

[2] MARTIN MARIETTA CORP LABS,BALTIMORE,MD 21227

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 11期

关键词：

D O I：

10.1063/1.338324

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5027 / 5030

页数：4

共 23 条

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