TRANSITION-METAL SILICIDES FORMED BY ION MIXING AND BY THERMAL ANNEALING - WHICH SPECIES MOVES

被引：42

作者：

AFFOLTER, K

ZHAO, XA

NICOLET, MA

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 08期

关键词：

D O I：

10.1063/1.335809

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3087 / 3093

页数：7

相关论文

共 24 条

[1] ALTERNATIVE MARKER EXPERIMENT IN FORMATION OF MO AND W SILICIDES
BAGLIN, J
DHEURLE, F
PETERSSON, S
[J]. APPLIED PHYSICS LETTERS, 1978, 33 (04) : 289 - 290
[2] IDENTIFICATION OF DOMINANT DIFFUSING SPECIES IN SILICIDE FORMATION
CHU, WK
KRAUTLE, H
MAYER, JW
MULLER, H
NICOLET, MA
TU, KN
[J]. APPLIED PHYSICS LETTERS, 1974, 25 (08) : 454 - 457
[3] GROWTH-RATES FOR PT2SI AND PTSI FORMATION UNDER UHV AND CONTROLLED IMPURITY ATMOSPHERES
CRIDER, CA
POATE, JM
[J]. APPLIED PHYSICS LETTERS, 1980, 36 (06) : 417 - 419
[4] COMPARISON OF ANNEALING AND ION-IMPLANTATION EFFECTS DURING SOLID-STATE DISILICIDE FORMATION
DHEURLE, FM
TSAI, MY
PETERSSON, CS
STRITZKER, B
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (04) : 3067 - 3069
[5] HO KT, 1983, THIN SOLID FILMS, V104, P243
[6] AN INERT MARKER STUDY FOR PALLADIUM SILICIDE FORMATION - SI MOVES IN POLYCRYSTALLINE PD2SI
HO, KT
LIEN, CD
SHRETER, U
NICOLET, MA
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (02) : 227 - 231
[7] MARKER EXPERIMENTS IN GROWTH-STUDIES OF NI2SI, PD2SI, AND CRSI2 FORMED BOTH BY THERMAL ANNEALING AND BY ION MIXING
HUNG, LS
MAYER, JW
PAI, CS
LAU, SS
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (04) : 1527 - 1536
[8] HUNG LS, 1984, THESIS CORNELL U
[9] WHEN IS THERMODYNAMICS RELEVANT TO ION-INDUCED ATOMIC REARRANGEMENTS IN METALS
JOHNSON, WL
CHENG, YT
VANROSSUM, M
NICOLET, MA
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 657 - 665
[10] COMPARISON OF THE NUCLEAR-REACTIONS O-18(P,ALPHA)N-15 AND O-16(D,ALPHA)N-14 TO STUDY THE OXYGEN EFFECTS IN PT SILICIDE FORMATION
LIEN, CD
WIELUNSKI, L
NICOLET, MA
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 213 (2-3): : 463 - 467