AN INERT MARKER STUDY FOR PALLADIUM SILICIDE FORMATION - SI MOVES IN POLYCRYSTALLINE PD2SI

被引：21

作者：

HO, KT

LIEN, CD

SHRETER, U

NICOLET, MA

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 02期

关键词：

D O I：

10.1063/1.334793

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：227 / 231

页数：5

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