FORMATION OF PALLADIUM AND TITANIUM SILICIDES BY RAPID THERMAL ANNEALING

被引:7
作者
LEVY, D
PONPON, JP
GROB, A
GROB, JJ
SIFFERT, P
机构
来源
PHYSICA B & C | 1985年 / 129卷 / 1-3期
关键词
D O I
10.1016/0378-4363(85)90570-4
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:205 / 209
页数:5
相关论文
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