MBE AS A PRODUCTION TECHNOLOGY FOR HEMT LSIS

被引：24

作者：

KONDO, K

SAITO, J

IGARASHI, T

NANBU, K

ISHIKAWA, T

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 95卷 / 1-4期

关键词：

D O I：

10.1016/0022-0248(89)90408-9

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：309 / 316

页数：8

共 48 条

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