VAPOR-PHASE ELECTROLYTIC DEPOSITION - A NOVEL METHOD FOR PREPARATION OF ORIENTATED THIN-FILMS

被引:7
作者
UCHIMOTO, Y
OKADA, T
OGUMI, Z
TAKEHARA, Z
机构
关键词
D O I
10.1039/c39940000585
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A novel method of electrolysis in the vapour phase which is carried out using glow-discharge plasma as conductive fluid has been devised for the preparation of orientated Ag+ ion conductive thin Agl films.
引用
收藏
页码:585 / 586
页数:2
相关论文
共 12 条
[1]   BIAS EFFECTS ON THE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON FILM IN A GLOW-DISCHARGE [J].
ANDO, K ;
AOZASA, M ;
PYON, RG .
APPLIED PHYSICS LETTERS, 1984, 44 (04) :413-415
[2]   IONIC-CONDUCTIVITY OF BETA-AGI [J].
CAVA, RJ ;
RIETMAN, EA .
PHYSICAL REVIEW B, 1984, 30 (12) :6896-6902
[3]   KINETIC-STUDY ON CHEMICAL VAPOR-DEPOSITION OF TITANIUM DISULFIDE THIN-FILM [J].
KANEHORI, K ;
KIRINO, F ;
ITO, Y ;
MIYAUCHI, K ;
KUDO, T .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (05) :1265-1270
[4]   LOW-TEMPERATURE SI EPITAXIAL-GROWTH BY ELECTRON-CYCLOTRON RESONANCE PLASMA CHEMICAL VAPOR-DEPOSITION [J].
KASAI, N ;
ENDO, N .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (07) :1983-1988
[5]  
KUWANO J, 1978, DENKI KAGAKU, V46, P353
[6]   FABRICATION AND EVALUATION OF POROUS AL2O3-AGI COMPOSITES [J].
NAGAI, M ;
NISHINO, T .
SOLID STATE IONICS, 1992, 53 :63-67
[7]   PREPARATION OF THIN YTTRIA-STABILIZED ZIRCONIA FILMS BY VAPOR-PHASE ELECTROLYTIC DEPOSITION [J].
OGUMI, Z ;
UCHIMOTO, Y ;
TSUJI, Y ;
TAKEHARA, Z .
SOLID STATE IONICS, 1992, 58 (3-4) :345-350
[8]   ELECTRODEPOSITION OF THIN YTTRIA-STABILIZED ZIRCONIA LAYERS USING GLOW-DISCHARGE PLASMA [J].
OGUMI, Z ;
UCHIMOTO, Y ;
TSUJI, Y ;
TAKEHARA, Z .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (04) :1577-1582
[9]   SILICON MOLECULAR-BEAM EPITAXY WITH SIMULTANEOUS ION IMPLANT DOPING [J].
OTA, Y .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (02) :1102-1110
[10]   THIN-FILM SOLID-STATE LITHIUM BATTERIES PREPARED BY CONSECUTIVE VAPOR-PHASE PROCESSES [J].
TAKEHARA, Z ;
OGUMI, Z ;
UCHIMOTO, Y ;
ENDO, E ;
KANAMORI, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1991, 138 (06) :1574-1582