A METHOD FOR INCREASING THE ETCH-RATE RATIO OF OXIDES TO NON-OXIDES IN INERT-GAS ION MILLING PROCESSES

被引：12

作者：

GERLACHMEYER, U ^{[1
]}

COBURN, JW ^{[1
]}

KAY, E ^{[1
]}

机构：

[1] IBM CORP,RES LAB,SAN JOSE,CA 95193

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 06期

关键词：

D O I：

10.1063/1.328048

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：3362 / 3364

页数：3

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