DETAILED CHARACTERIZATION OF TIC AND TIN COATINGS PREPARED BY THE ACTIVATED REACTIVE EVAPORATION PROCESS

被引：12

作者：

LIN, P ^{[1
]}

DESHPANDEY, C ^{[1
]}

DOERR, HJ ^{[1
]}

BUNSHAH, RF ^{[1
]}

KAUFHERR, N ^{[1
]}

NIELSEN, R ^{[1
]}

FENSKE, G ^{[1
]}

机构：

[1] ARGONNE NATL LAB,ARGONNE,IL 60439

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574730

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2732 / 2736

页数：5

共 10 条

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[7]

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[9] SYNTHESIS OF TITANIUM NITRIDES BY ACTIVATED REACTIVE EVAPORATION [J].

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