OPTICAL-PROPERTIES AND PHASE-TRANSFORMATIONS IN ALPHA-IRON AND BETA-IRON DISILICIDE LAYERS

被引:52
作者
HUNT, TD
REESON, KJ
HOMEWOOD, KP
TEON, SW
GWILLIAM, RM
SEALY, BJ
机构
[1] Department of Electronic and Electrical Engineering, University of Surrey, Guildford
关键词
D O I
10.1016/0168-583X(94)95747-9
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Ion beam synthesis (IBS) has been used to fabricate semiconducting beta-FeSi2 and metallic alpha-Fe0.82Si2. For all of the doses studied a photoluminescence (PL) signal is observed at 1.54 mu m. This signal is first seen after annealing at 800 degrees C and increases in intensity with a commensurate decrease in full width half maximum (FWHM) as the anneal temperature is increased up to 920 degrees C. Likewise the intensity increases and FWHM decreases as the anneal time at 920 degrees C is increased up to 18 h. Optical absorption measurements reveal a linear relationship between the square of the absorption coefficient and the incident photon energy, indicating a direct allowed transition from a semiconductor (beta-FeSi2) with a band gap of about 0.87 eV. After annealing at 1000 degrees C no PL or absorption is observed in this spectral region; this is because a thicker, conducting layer of alpha-Fe0.82Si2, containing similar to 18% Fe vacancies has then been formed. If an alpha-Fe0.82Si2 layer is subsequently annealed below the phase transition temperature(similar to 950 degrees C) then the PL signal reappears as the layer is largely reconverted back to the beta-phase.
引用
收藏
页码:168 / 171
页数:4
相关论文
共 15 条
[1]   ELECTRONIC-STRUCTURE OF BETA-FESI2 [J].
CHRISTENSEN, NE .
PHYSICAL REVIEW B, 1990, 42 (11) :7148-7153
[2]   ION-BEAM-INDUCED SIMULTANEOUS EPITAXIAL-GROWTH OF ALPHA AND CUBIC FESI2 IN SI(100) AT 320-DEGREES-C [J].
DESIMONI, J ;
BEHAR, M ;
BERNAS, H ;
LIN, XW ;
LILIENTALWEBER, Z ;
WASHBURN, J .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 :755-758
[3]   ELECTRONIC-PROPERTIES OF SEMICONDUCTING FESI2 FILMS [J].
DIMITRIADIS, CA ;
WERNER, JH ;
LOGOTHETIDIS, S ;
STUTZMANN, M ;
WEBER, J ;
NESPER, R .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (04) :1726-1734
[4]   ABINITIO BAND-STRUCTURE CALCULATION OF THE SEMICONDUCTOR BETA-FESI2 [J].
EPPENGA, R .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (06) :3027-3029
[5]  
HUNT TD, 1992, MATER RES SOC SYMP P, V260, P239, DOI 10.1557/PROC-260-239
[6]   ION-BEAM SYNTHESIS OF ALPHA AND BETA FESI2 LAYERS [J].
HUNT, TD ;
SEALY, BJ ;
REESON, KJ ;
GWILLIAM, RM ;
HOMEWOOD, KP ;
WILSON, RJ ;
MEEKISON, CD ;
BOOKER, GR .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 74 (1-2) :60-64
[7]   A COMPARISON OF SHALLOW AND DEEP IRON SILICIDE LAYERS FABRICATED BY ION-BEAM SYNTHESIS [J].
HUNT, TD ;
REESON, KJ ;
GWILLIAM, RM ;
HOMEWOOD, KP ;
WILSON, RJ ;
SEALY, BJ ;
MEEKISON, CD ;
BOOKER, GR ;
OBERSCHACHTSIEK, P .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 :781-785
[8]   OPTICAL AND ELECTRICAL CHARACTERIZATION OF BETA-FESI2 EPITAXIAL THIN-FILMS ON SILICON SUBSTRATES [J].
LEFKI, K ;
MURET, P ;
CHERIEF, N ;
CINTI, RC .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (01) :352-357
[9]   ION-BEAM SYNTHESIS OF BURIED METALLIC AND SEMICONDUCTING SILICIDES [J].
MANTL, S .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 :895-900
[10]   INVESTIGATION OF ION-BEAM SYNTHESIZED FESI2 AND THE ALPHA-]BETA-PHASE TRANSFORMATION [J].
PANKNIN, D ;
WIESER, E ;
WOLLSCHLAGER, K ;
GROTZSCHEL, R ;
SKORUPA, W ;
QUERNER, G .
VACUUM, 1993, 44 (3-4) :171-174