SECONDARY ION MASS-SPECTROMETRY DEPTH PROFILING AND SIMULTANEOUS ELECTRICAL INVESTIGATION OF MOS STRUCTURES

被引：14

作者：

BARSONY, I ^{[1
]}

MARTON, D ^{[1
]}

GIBER, J ^{[1
]}

机构：

[1] TECH UNIV BUDAPEST, INST PHYS, H-1521 BUDAPEST, HUNGARY

来源：

THIN SOLID FILMS | 1978年 / 51卷 / 03期

关键词：

D O I：

10.1016/0040-6090(78)90289-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：275 / 285

页数：11

共 27 条

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