A COMPARATIVE-STUDY OF THE ADSORPTION OF CH2CL2, CH3L AND CH2L2 ON GAAS(100) SURFACES AT 300 K

被引：3

作者：

FRANCIS, SM

GOULDING, PA

PEMBLE, ME

机构：

[1] Dept of Chemistry, University of Manchester Institute of Science and Technology, Manchester, M60 1QD, Sackville St

来源：

VACUUM | 1990年 / 41卷 / 4-6期

关键词：

D O I：

10.1016/0042-207X(90)93819-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

It is demonstrated that CH2Cl2, CH3l and CH2l2 adsorb on a clean As-rich GaAs(100) substrate surface at 300 K. The reactivity of these species towards the GaAs(100) surface follows the order CH2Cl2 < CH3l < CH2l2 with the l-containing species producing marked As-depletion. The implications of these data for the design of laser-assisted, selective-area etching processes are discussed. © 1990.

引用

页码：909 / 911

页数：3

共 8 条

[1] PHOTON-ASSISTED DRY ETCHING OF GAAS [J].

BREWER, P ;

HALLE, S ;

OSGOOD, RM .

APPLIED PHYSICS LETTERS, 1984, 45 (04) :475-477

[2] EXCIMER LASER PROJECTION ETCHING OF GAAS [J].

BREWER, PD ;

MCCLURE, D ;

OSGOOD, RM .

APPLIED PHYSICS LETTERS, 1986, 49 (13) :803-805

[3] DRY, LASER-ASSISTED RAPID HBR ETCHING OF GAAS [J].

BREWER, PD ;

MCCLURE, D ;

OSGOOD, RM .

APPLIED PHYSICS LETTERS, 1985, 47 (03) :310-312

[4] SURFACE SCIENCE STUDIES OF SEMICONDUCTOR GROWTH-PROCESSES [J].

BUHAENKO, DS ;

FRANCIS, SM ;

GOULDING, PA ;

PEMBLE, ME .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06) :1688-1693

[5] THE INTERACTION OF H-2 WITH GAAS (100) SURFACES - A MODEL STUDY OF MOVPE SUBSTRATE PREPARATION [J].

BUHAENKO, DS ;

FRANCIS, SM ;

GOULDING, PA ;

PEMBLE, ME .

JOURNAL OF CRYSTAL GROWTH, 1989, 97 (3-4) :591-594

[6] ELECTRON STIMULATED OXIDATION OF GAAS, STUDIED BY QUANTITATIVE AUGER-ELECTRON SPECTROSCOPY [J].

RANKE, W ;

JACOBI, K .

SURFACE SCIENCE, 1975, 47 (02) :525-542

[7] LASER CHEMICAL ETCHING OF VIAS IN GAAS [J].

TUCKER, AW ;

BIRNBAUM, M .

IEEE ELECTRON DEVICE LETTERS, 1983, 4 (02) :39-41

[8] LEED, AES AND PHOTOEMISSION MEASUREMENTS OF EPITAXIALLY GROWN GAAS(001), (111)A AND (111)B SURFACES AND THEIR BEHAVIOR UPON CS ADSORPTION [J].

VANBOMMEL, AJ ;

CROMBEEN, JE ;

VANOIRSCHOT, TGJ .

SURFACE SCIENCE, 1978, 72 (01) :95-108

← 1 →