DIELECTRICALLY-BONDED LONG-WAVELENGTH VERTICAL-CAVITY LASER ON GAAS SUBSTRATES USING STRAIN-COMPENSATED MULTIPLE-QUANTUM WELLS

被引:10
作者
CHUA, CL [1 ]
LIN, CH [1 ]
ZHU, ZH [1 ]
LO, YH [1 ]
HONG, M [1 ]
MANNAERTS, JP [1 ]
BHAT, R [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
基金
美国国家科学基金会;
关键词
D O I
10.1109/68.392231
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present a novel low temperature bonding technique for fabricating long wavelength vertical cavity surface emitting lasers (VCSEL's). The technique relies on a 750 Angstrom-thick intermediate spin-on glass layer to join a highly efficient InP-based InGaAs-InGaAsP strain-compensated multiple quantum well (SC-MQW) gain medium on a GaAs substrate, We fabricated the device on GaAs in order to take advantage of highly reflective AlAs-GaAs Bragg reflectors, The optically-pumped device has a low threshold pump power of 4.2 kW/cm(2) at room temperature and operates at a wavelength of 1.44 mu m.
引用
收藏
页码:1400 / 1402
页数:3
相关论文
共 15 条
[1]   ROOM-TEMPERATURE PHOTOPUMPED OPERATION OF AN INGAAS-INP VERTICAL CAVITY SURFACE-EMITTING LASER [J].
DEPPE, DG ;
SINGH, S ;
DUPUIS, RD ;
GERRARD, ND ;
ZYDZIK, GJ ;
VANDERZIEL, JP ;
GREEN, CA ;
PINZONE, CJ .
APPLIED PHYSICS LETTERS, 1990, 56 (22) :2172-2174
[2]   LOW-THRESHOLD, WAFER FUSED LONG-WAVELENGTH VERTICAL-CAVITY LASERS [J].
DUDLEY, JJ ;
BABIC, DI ;
MIRIN, R ;
YANG, L ;
MILLER, BI ;
RAM, RJ ;
REYNOLDS, T ;
HU, EL ;
BOWERS, JE .
APPLIED PHYSICS LETTERS, 1994, 64 (12) :1463-1465
[3]   144-DEGREES-C OPERATION OF 1.3 MU-M INGAASP VERTICAL CAVITY LASERS ON GAAS SUBSTRATES [J].
DUDLEY, JJ ;
ISHIKAWA, M ;
BABIC, DI ;
MILLER, BI ;
MIRIN, R ;
JIANG, WB ;
BOWERS, JE ;
HU, EL .
APPLIED PHYSICS LETTERS, 1992, 61 (26) :3095-3097
[4]   WAFER BONDING FOR SILICON-ON-INSULATOR TECHNOLOGIES [J].
LASKY, JB .
APPLIED PHYSICS LETTERS, 1986, 48 (01) :78-80
[5]   PHOTOPUMPED LONG-WAVELENGTH VERTICAL-CAVITY SURFACE-EMITTING LASERS USING STRAIN-COMPENSATED MULTIPLE-QUANTUM WELLS [J].
LIN, CH ;
CHUA, CL ;
ZHU, ZH ;
EJECKAM, FE ;
WU, TC ;
LO, YH ;
BHAT, R .
APPLIED PHYSICS LETTERS, 1994, 64 (25) :3395-3397
[6]   SEMICONDUCTOR-LASERS ON SI SUBSTRATES USING THE TECHNOLOGY OF BONDING BY ATOMIC REARRANGEMENT [J].
LO, YH ;
BHAT, R ;
HWANG, DM ;
CHUA, C ;
LIN, CH .
APPLIED PHYSICS LETTERS, 1993, 62 (10) :1038-1040
[7]   BONDING BY ATOMIC REARRANGEMENT OF INP/INGAASP 1.5-MU-M WAVELENGTH LASERS ON GAAS SUBSTRATES [J].
LO, YH ;
BHAT, R ;
HWANG, DM ;
KOZA, MA ;
LEE, TP .
APPLIED PHYSICS LETTERS, 1991, 58 (18) :1961-1963
[8]   STRAIN-COMPENSATED STRAINED-LAYER SUPERLATTICES FOR 1.5-MU-M WAVELENGTH LASERS [J].
MILLER, BI ;
KOREN, U ;
YOUNG, MG ;
CHIEN, MD .
APPLIED PHYSICS LETTERS, 1991, 58 (18) :1952-1954
[9]   FABRICATION OF A GAAS-ALGAAS GRIN-SCH SQW LASER DIODE ON SILICON BY EPITAXIAL LIFT-OFF [J].
POLLENTIER, I ;
BUYDENS, L ;
VANDAELE, P ;
DEMEESTER, P .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1991, 3 (02) :115-117
[10]   LOW-THRESHOLD, ROOM-TEMPERATURE PULSED OPERATION OF 1.5-MU-M VERTICAL-CAVITY SURFACE-EMITTING LASERS WITH AN OPTIMIZED MULTIQUANTUM-WELL ACTIVE LAYER [J].
UOMI, K ;
YOO, SJB ;
SCHERER, A ;
BHAT, R ;
ANDREADAKIS, NC ;
ZAH, CE ;
KOZA, MA ;
LEE, TP .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1994, 6 (03) :317-319