CHEMICAL ETCHING AND POLISHING OF INP

被引：14

作者：

KURTH, E

REIF, A

GOTTSCHALCH, V

FINSTER, J

BUTTER, E

机构：

来源：

CRYSTAL RESEARCH AND TECHNOLOGY | 1988年 / 23卷 / 01期

关键词：

D O I：

10.1002/crat.2170230117

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：117 / 126

页数：10

共 22 条

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