USE OF 111-TRICHLOROETHANE AS AN OPTIMIZED ADDITIVE TO IMPROVE SILICON THERMAL-OXIDATION TECHNOLOGY

被引：29

作者：

JANSSENS, EJ ^{[1
]}

DECLERCK, GJ ^{[1
]}

机构：

[1] CATHOLIC UNIV LEUVEN,DEPT ELEKTROTECH,B-3030 HEVERLE,BELGIUM

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 10期

关键词：

D O I：

10.1149/1.2131275

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1696 / 1703

页数：8

共 67 条

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