PREPARATION AND CHARACTERIZATION OF MULTILAYER METALLIZATION STRUCTURES WITH TITANIUM NITRIDE AND TITANIUM SILICIDE

被引：7

作者：

PANJAN, P

NAVINSEK, B

ZABKAR, A

MANDRINO, D

GODEC, M

KOZELJ, M

KRIVOKAPIC, Z

ZALAR, A

机构：

[1] ISKRA MICROELECTR,YU-61000 LJUBLJANA,YUGOSLAVIA

[2] INST ELECTR & VACUUM TECH,YU-61000 LJUBLJANA,YUGOSLAVIA

来源：

关键词：

D O I：

10.1016/0040-6090(89)90470-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：35 / 41

页数：7

共 16 条

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[10] SILICIDE FORMATION
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