THE PRODUCTION OF REPETITIVE SURFACE-FEATURES BY OBLIQUE-INCIDENCE ION-BOMBARDMENT

被引：17

作者：

CARTER, G ^{[1
]}

NOBES, MJ ^{[1
]}

KATARDJIEV, IV ^{[1
]}

机构：

[1] UNIV UPPSALA,SCH ENGN,DEPT TECHNOL,S-75121 UPPSALA,SWEDEN

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1993年 / 68卷 / 02期

关键词：

D O I：

10.1080/01418639308226404

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A generalized model to describe the evolution of surface topography during sputtering erosion by non-normally incident ion bombardment is presented. The lowest-order differential equations are solved for both a continuum description and a stochastic description of erosion and reveal the evolution of travelling-wave-like structures in both cases.

引用

页码：231 / 236

页数：6

共 24 条

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