A STUDY OF HEATING RATE AND TEXTURE INFLUENCES ON ANNEALING HILLOCKS BY A STATISTICAL CHARACTERIZATION OF AL THIN-FILM TOPOGRAPHY

被引：21

作者：

BACCONNIER, B

LORMAND, G

PAPAPIETRO, M

ACHARD, M

PAPON, AM

机构：

[1] INST NATL SCI APPL LYON,THERMOCHIM MINERALE LAB,CNRS,UA 116,F-69621 VILLEURBANNE,FRANCE

[2] INST NATL SCI APPL LYON,ETUD MAT LAB,CNRS,UA 798,F-69621 VILLEURBANNE,FRANCE

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 11期

关键词：

D O I：

10.1063/1.342065

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：6483 / 6489

页数：7

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