ELIMINATION OF HILLOCKS ON AL-SI METALLIZATION BY FAST-HEAT-PULSE ALLOYING

被引：17

作者：

FAITH, TJ

WU, CP

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 45卷 / 04期

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D O I：

10.1063/1.95219

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：470 / 472

页数：3

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