LASER SYNTHESIS OF THIN-FILMS OF METAL SILICIDES

被引：18

作者：

DANNA, E

LEGGIERI, G

LUCHES, A

机构：

[1] Unità di Ricerca INFM, University of Lecce, Department of Physics, Lecce

来源：

THIN SOLID FILMS | 1992年 / 218卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90908-T

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The results obtained in the field of the laser synthesis of thin film metal silicides are reviewed. Particular emphasis is given to work using pulsed lasers in the nanosecond regime. The formation of stable and metastable compounds and of multilayer structures is presented. The structure and the surface morphology of the synthesized films are discussed. The reaction mechanisms are investigated by a comparison of the experimental results with computer models based on heat flow and temperature calculations.

引用

收藏

页码：95 / 108

页数：14

相关论文

共 48 条

[21]

DANNA E, 1984, LASER PROCESSING DIA, P370

[22] EUTECTIC MELTING BY PULSED ION-BEAM IRRADIATION [J].

FASTOW, R ;

MAYER, JW ;

BRAT, T ;

EIZENBERG, M ;

OLOWOLAFE, JO .

APPLIED PHYSICS LETTERS, 1985, 46 (11) :1052-1054

[23] THE FE/SI(100) INTERFACE [J].

GALLEGO, JM ;

MIRANDA, R .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (03) :1377-1383

[24] LASER-INDUCED SILICIDE FORMATION [J].

GARTNER, K ;

GOTZ, G ;

KASCHNER, C ;

KASKO, I ;

WITZMANN, A ;

ZENTGRAF, A .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1989, 112 (02) :747-752

[25] FAR UV PULSED LASER MELTING OF SILICON [J].

GORODETSKY, G ;

KANICKI, J ;

KAZYAKA, T ;

MELCHER, RL .

APPLIED PHYSICS LETTERS, 1985, 46 (06) :547-549

[26] EPITAXIAL NISI2 FORMATION BY PULSED LASER IRRADIATION OF THIN NI LAYERS DEPOSITED ON SI SUBSTRATES [J].

GRIMALDI, MG ;

BAERI, P ;

RIMINI, E ;

CELOTTI, G .

APPLIED PHYSICS LETTERS, 1983, 43 (03) :244-246

[27] EXCIMER LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF TITANIUM SILICIDE [J].

GUPTA, A ;

WEST, GA ;

BEESON, KW .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (09) :3573-3582

[28]

HERD S, 1983, APPL PHYS LETT, V42, P597, DOI 10.1063/1.94014

[29] OPTICAL-PROPERTIES OF LASER-MELT-QUENCHED AU-SI ALLOYS [J].

HUBER, E ;

VONALLMEN, M .

PHYSICAL REVIEW B, 1983, 28 (06) :2979-2984

[30] ELECTRON-BEAM INDUCED REACTIONS IN METAL SI SYSTEMS [J].

MAJNI, G ;

NAVA, F ;

OTTAVIANI, G ;

LUCHES, A ;

NASSISI, V ;

CELOTTI, G .

VACUUM, 1982, 32 (01) :11-18

← 1 2 3 4 5 →