STRAIN, ION-BOMBARDMENT AND ENERGETIC NEUTRALS IN MAGNETRON SPUTTERING

被引：47

作者：

WINDOW, B

MULLER, KH

机构：

来源：

THIN SOLID FILMS | 1989年 / 171卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90043-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：183 / 196

页数：14

共 25 条

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