CONTRIBUTION TO THE STUDY OF THE DYNAMICAL PROPERTIES OF THE B-SI(111) ROOT-3X-ROOT-3 SURFACE - EFFECT OF THE DOPANT BEHAVIOR, FROM THE INFRARED TO THE VISIBLE ENERGY-RANGE

被引:4
作者
FONTAINE, M
LAYET, JM
机构
[1] CRMC2-CNRS-département de physique, faculté des sciences de Luminy, 13288 Marseille cedex 09
关键词
D O I
10.1016/0368-2048(93)80080-6
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
High resolution energy electron loss spectroscopy have been performed on boron implanted Si(lll) surfaces. We have studied the evolution of the HREELS spectrum as a function of the annealing temperature (from 750 degrees C to 1100 degrees C). At 750 degrees C we observe the appearance of the root 3x root 3 superstructure which persists up to 1000 degrees C. We get two main results in the infrared energy range. The first one is the evolution, due to the dopant diffusion, of the energetic position of a loss peak located at approximately 150 meV. The second one is the appearance of a sharp loss feature at 56 meV. It corresponds to the Si-Si frequency (optical phonon) and is correlated to the existence of a charge transfer due to the B sites in the reconstruction.
引用
收藏
页码:201 / 205
页数:5
相关论文
共 13 条
[1]   SURFACE DOPING AND STABILIZATION OF SI(111) WITH BORON [J].
BEDROSSIAN, P ;
MEADE, RD ;
MORTENSEN, K ;
CHEN, DM ;
GOLOVCHENKO, JA ;
VANDERBILT, D .
PHYSICAL REVIEW LETTERS, 1989, 63 (12) :1257-1260
[2]   ADATOM REGISTRY ON SI(111)-(SQUARE-ROOT-3XSQUARE-ROOT-3)R 30-DEGREES-B [J].
BEDROSSIAN, P ;
MORTENSEN, K ;
CHEN, DM ;
GOLOVCHENKO, JA .
PHYSICAL REVIEW B, 1990, 41 (11) :7545-7548
[3]  
DERMUTH JE, 1985, APPL SURF SCI, V22, P415
[4]   POLARIZATION DEPENDENCE OF SI(111)-2X1 SURFACE-PHONON AND SURFACE-STATE EXCITATIONS [J].
DINARDO, NJ ;
THOMPSON, WA ;
SCHELLSOROKIN, AJ ;
DEMUTH, JE .
PHYSICAL REVIEW B, 1986, 34 (04) :3007-3010
[5]   THE EFFECT OF INHOMOGENEOUS DOPANT PROFILES ON THE ELECTRON-ENERGY LOSS SPECTRA OF SI(100) [J].
FORSTER, A ;
LAYET, JM ;
LUTH, H .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 47 (01) :95-97
[6]   OCCUPIED AND UNOCCUPIED SURFACE-STATES ON THE SI(111) ROOT 3 X ROOT 3-B SURFACE [J].
GREHK, TM ;
MARTENSSON, P ;
NICHOLLS, JM .
PHYSICAL REVIEW B, 1992, 46 (04) :2357-2362
[7]   STRUCTURE DETERMINATION OF THE SI(111) - B(SQUARE-ROOT-3 X SQUARE-ROOT-3)R 30-DEGREES SURFACE - SUBSURFACE SUBSTITUTIONAL DOPING [J].
HEADRICK, RL ;
ROBINSON, IK ;
VLIEG, E ;
FELDMAN, LC .
PHYSICAL REVIEW LETTERS, 1989, 63 (12) :1253-1256
[8]   ATOMIC-STRUCTURE OF SI(111) (SQUARE-ROOT-3XSQUARE-ROOT-3) R30-DEGREES-B BY DYNAMIC LOW-ENERGY ELECTRON-DIFFRACTION [J].
HUANG, H ;
TONG, SY ;
QUINN, J ;
JONA, F .
PHYSICAL REVIEW B, 1990, 41 (05) :3276-3279
[9]  
Ibach H., 1982, ELECTRON ENERGY LOSS
[10]   ELECTRONIC STATES DUE TO SURFACE DOPING - SI(111)-SQUARE-ROOT-3X-SQUARE-ROOT-3B [J].
KAXIRAS, E ;
PANDEY, KC ;
HIMPSEL, FJ ;
TROMP, RM .
PHYSICAL REVIEW B, 1990, 41 (02) :1262-1265