THERMAL-OXIDATION OF INP

被引：90

作者：

WAGER, JF

WILMSEN, CW

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 01期

关键词：

D O I：

10.1063/1.327302

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：812 / 814

页数：3

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