A COMPARISON BETWEEN MICROMACHINED PRESSURE SENSORS USING QUARTZ OR SILICON VIBRATING BEAMS

被引：6

作者：

DUFOUR, M

DELAYE, MT

MICHEL, F

DANEL, JS

DIEM, B

DELAPIERRE, G

机构：

[1] LETI, CENG, 38041 Grenoble Cédex

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1992年 / 34卷 / 03期

关键词：

D O I：

10.1016/0924-4247(92)85003-K

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this comparison between quartz and silicon as convenient materials for micromachined pressure sensors, we first examine the mechanical properties of the materials, then the technical and technological problems connected with the design of the resonator itself. Next, attention is paid to the mechanical chain by means of which the external pressure is converted into a stress applied to the resonator. Finally, questions related to the whole device (packaging, interconnecting) are discussed.

引用

页码：201 / 209

页数：9

共 11 条

[1] EXCITATION AND DETECTION OF VIBRATIONS OF MICROMECHANICAL STRUCTURES USING A DIELECTRIC THIN-FILM [J].

BOUWSTRA, S ;

BLOM, FR ;

LAMMERINK, TSJ ;

YNTEMA, H ;

SCHRAP, P ;

FLUITMAN, JHJ ;

ELWENSPOEK, M .

SENSORS AND ACTUATORS, 1989, 17 (1-2) :219-223

[2]

DANEL JS, 1990, SENSOR ACTUAT A-PHYS, V21, P971

[3] ETCHED SILICON VIBRATING SENSOR [J].

GREENWOOD, JC .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1984, 17 (08) :650-652

[4] A VIBRATING CANTILEVER MAGNETIC-FIELD SENSOR [J].

HETRICK, RE .

SENSORS AND ACTUATORS, 1989, 16 (03) :197-207

[5] DEBYE-SEARS EFFECT FOR DETERMINATION OF ELASTIC CONSTANTS OF SILICON [J].

METZGER, H ;

KESSLER, FR .

ZEITSCHRIFT FUR NATURFORSCHUNG PART A-ASTROPHYSIK PHYSIK UND PHYSIKALISCHE CHEMIE, 1970, A 25 (06) :904-&

[6] ELECTROTHERMALLY EXCITED SILICON BEAM MECHANICAL RESONATORS [J].

OTHMAN, MB ;

BRUNNSCHWEILER, A .

ELECTRONICS LETTERS, 1987, 23 (14) :728-730

[7] THERMALLY EXCITED SILICON MICROACTUATORS [J].

RIETHMULLER, W ;

BENECKE, W .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) :758-763

[8] A THERMALLY-EXCITED SILICON ACCELEROMETER [J].

SATCHELL, DW ;

GREENWOOD, JC .

SENSORS AND ACTUATORS, 1989, 17 (1-2) :241-245

[9] RESONANT DIAPHRAGM PRESSURE MEASUREMENT SYSTEM WITH ZNO ON SI EXCITATION [J].

SMITS, JG ;

TILMANS, HAC ;

HOEN, K ;

MULDER, H ;

VANVUUREN, J ;

BOOM, G .

SENSORS AND ACTUATORS, 1983, 4 (04) :565-571

[10]

WATKINS RD, 1989, 11TH P QUARTZ DEV C, V1, P6

← 1 2 →