THE OXYGEN EFFECT IN THE GROWTH-KINETICS OF PLATINUM SILICIDES

被引：63

作者：

NAVA, F

VALERI, S

MAJNI, G

CEMBALI, A

PIGNATEL, G

QUEIROLO, G

机构：

[1] CNR,LAMEL,I-40126 BOLOGNA,ITALY

[2] SGS,DEPT PHYS,MILANO,ITALY

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 11期

关键词：

D O I：

10.1063/1.328655

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6641 / 6646

页数：6

共 15 条

[1]

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[7] PLATINUM SILICIDE FORMATION - ELECTRON-SPECTROSCOPY OF PLATINUM-PLATINUM SILICIDE INTERFACE [J].

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[10] KINETICS AND MECHANISM OF PLATINUM SILICIDE FORMATION ON SILICON [J].

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