REACTIONS OF LASER-GENERATED CF2 ON SILICON AND SILICON-OXIDE SURFACES

被引：29

作者：

LANGAN, JG ^{[1
]}

SHORTER, JA ^{[1
]}

XIN, X ^{[1
]}

JOYCE, SA ^{[1
]}

STEINFELD, JI ^{[1
]}

机构：

[1] MIT,DEPT CHEM,CAMBRIDGE,MA 02139

来源：

SURFACE SCIENCE | 1989年 / 207卷 / 2-3期

关键词：

D O I：

10.1016/0039-6028(89)90127-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：344 / 353

页数：10

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