共 46 条
- [1] Behrisch, 1983, SPUTTERING PARTICLE, V52
- [3] STUDY OF CHARGING AND DISSOCIATION OF SIO2 SURFACES BY AES [J]. SURFACE SCIENCE, 1977, 64 (01) : 209 - 223
- [5] F2 ADSORPTION ON SI OBSERVED WITH SIMS AND QCM [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 480 - 483
- [6] PLASMA-ASSISTED ETCHING - ION-ASSISTED SURFACE-CHEMISTRY [J]. APPLICATIONS OF SURFACE SCIENCE, 1985, 22-3 (MAY): : 63 - 71
- [8] DAGATA JA, IN PRESS J VACUUM SC