RADIATION-INDUCED TRIVALENT SILICON DEFECT BUILDUP AT THE SI-SIO2 INTERFACE IN MOS STRUCTURES

被引：61

作者：

LENAHAN, PM ^{[1
]}

BROWER, KL ^{[1
]}

DRESSENDORFER, PV ^{[1
]}

JOHNSON, WC ^{[1
]}

机构：

[1] PRINCETON UNIV, DEPT ELECT ENGN & COMP SCI, PRINCETON, NJ 08544 USA

来源：

IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 1981年 / 28卷 / 06期

关键词：

D O I：

10.1109/TNS.1981.4335683

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：4105 / 4106

页数：2

共 16 条

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[2] CURRENT UNDERSTANDING OF CHARGES IN THERMALLY OXIDIZED SILICON STRUCTURE
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (06) : C198 - C205
[3] SURFACE STATES IN SILICON FROM CHARGES IN OXIDE COATING
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[4] THEORY OF THE ELECTRONIC-STRUCTURE OF THE SI-SIO2 INTERFACE
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[J]. PHYSICAL REVIEW B, 1980, 21 (12): : 5733 - 5744
[5] McGarrity J M, 1978, PHYSICS SIO2 ITS INT, V428
[6] A FRAMEWORK FOR UNDERSTANDING RADIATION-INDUCED INTERFACE STATES IN SIO2 MOS STRUCTURES
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[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1980, 27 (06) : 1651 - 1657
[7] A MODEL OF INTERFACE STATES AND CHARGES AT THE SI-SIO2 INTERFACE - ITS PREDICTIONS AND COMPARISONS WITH EXPERIMENTS
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[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (01) : 320 - 337
[8] LOW-ENERGY ELECTRON-IRRADIATION OF SI-SIO2 INTERFACE
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[J]. THIN SOLID FILMS, 1972, 14 (01) : S7 - S10
[9] INTERFACE STATES AND ELECTRON-SPIN RESONANCE CENTERS IN THERMALLY OXIDIZED (111) AND (100) SILICON-WAFERS
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RAZOUK, RR
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (02) : 879 - 884
[10] DEFECT STRUCTURE AND IRRADIATION BEHAVIOR OF NONCRYSTALLINE S102
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[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1971, NS18 (06) : 113 - &

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