MICRO-FOCUS DOUBLE-CRYSTAL X-RAY-DIFFRACTOMETRY ON III-V HETEROSTRUCTURES GROWN BY SELECTIVE-AREA EPITAXY

被引：10

作者：

IBERL, A

SCHUSTER, M

GOBEL, H

MEYER, A

BAUR, B

MATZ, R

SNIGIREV, A

SNIGIREVA, I

FREUND, A

LENGELER, B

HEINECKE, H

机构：

[1] EUROPEAN SYNCHROTRON RADIAT FACIL, F-38043 GRENOBLE, FRANCE

[2] UNIV ULM, DEPT SEMICOND PHYS, D-89069 ULM, GERMANY

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1995年 / 28卷 / 4A期

关键词：

D O I：

10.1088/0022-3727/28/4A/039

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Some III-V heterostructures grown by selective area MOMBE and MOVPE were investigated by double-crystal diffractometry with high spatial resolution. The high spatial resolution was achieved using synchrotron radiation focused by one-dimensional Bragg-Fresnel x-ray optics to a line focus of 2 mu m width. The lattice mismatch close to growth/non-growth boundaries was investigated by performing rocking curve scans with micrometre step width across the lateral transition zones. The rocking curves reveal material variations at the boundaries in the range of 100 mu m for MOVPE to below 6 mu m for MOMBE.

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页码：A200 / A205

页数：6

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