INERT-GAS ENTRAPMENT IN FILMS PRODUCED BY ION-ASSISTED PHYSICAL VAPOR-DEPOSITION PROCESSES

被引：8

作者：

GRIGOROV, GI

MARTEV, IN

机构：

来源：

THIN SOLID FILMS | 1988年 / 156卷 / 02期

关键词：

D O I：

10.1016/0040-6090(88)90320-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：265 / 269

页数：5

共 12 条

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[8]

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[9]

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