METHOD FOR DETERMINATION OF DIFFUSION-COEFFICIENTS FROM CARRIER CONCENTRATION DEPTH PROFILES IN SILICON

被引：5

作者：

BAKOWSKI, A

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1980年 / 127卷 / 07期

关键词：

D O I：

10.1149/1.2129968

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：1644 / 1649

页数：6

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