共 26 条
[4]
APPLICATION OF IONIC MICROANALYSIS TO DETERMINATION OF BORON DEPTH PROFILES IN SILICON AND SILICA
[J].
JOURNAL OF RADIOANALYTICAL CHEMISTRY,
1972, 12 (01)
:85-94
[6]
DIFFUSION OF BORON, PHOSPHORUS, ARSENIC, AND ANTIMNY INTO (100( AND (111( SILICON SLICES
[J].
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS,
1970, 58 (04)
:588-&
[8]
COLBY JW, 1975, SCANNING ELECTRON MI
[9]
FAIR RB, 1974, OCT EL SOC M NEW YOR