STUDIES OF BARRIER HEIGHT MECHANISMS IN METAL SILICON-NITRIDE SILICON SCHOTTKY-BARRIER DIODES

被引:12
作者
SOBOLEWSKI, MA
HELMS, CR
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 04期
关键词
D O I
10.1116/1.584589
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:971 / 979
页数:9
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