APPLICATION OF ELECTRIC MICROACTUATORS TO SILICON MICROMECHANICS

被引：6

作者：

MAHADEVAN, R ^{[1
]}

MEHREGANY, M ^{[1
]}

GABRIEL, KJ ^{[1
]}

机构：

[1] MIT,CAMBRIDGE,MA 02139

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 21卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(90)85043-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A method for the measurement of residual stress, Young's modulus, and fatigue in thin films under tension using surface micromachined electric microactuators is presented. Among the features of this technique are the availability of a continuously varying load and the potential for performing dynamic studies. The force generated by an electric microactuator is used to produce mechanical deformations in the material of interest. In this paper, the design, fabrication and experimental results on a specific device for the study of BTDA-ODA/MPDA polyimide films are presented. © 1990.

引用

页码：219 / 225

页数：7

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