共 12 条
[1]
GAAS AND ALGAAS ANISOTROPIC FINE PATTERN ETCHING USING A NEW REACTIVE ION-BEAM ETCHING SYSTEM
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1985, 3 (01)
:402-405
[4]
BEHFARRAD A, 1990, THESIS CORNELL U ANN
[5]
CASEY HC, 1978, HETEROSTRUCTURE LA A, P79