INTERFACE MORPHOLOGY IN CHEMICAL VAPOR-DEPOSITION ON PROFILED SUBSTRATES

被引：16

作者：

VANDENBREKEL, CHJ

JANSEN, AK

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1978年 / 43卷 / 04期

关键词：

D O I：

10.1016/0022-0248(78)90348-2

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：488 / 496

页数：9

共 10 条

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[3]

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SHAW DW, 1975, CRYSTAL GROWTH CHARA, P207

[7] EPITAXIAL DEPOSITION OF SILICON IN DEEP GROOVES [J].

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[8]

VANDENBREKEL CHJ, 1977, PHILIPS RES REP, V32, P118

[9]

VANDENBREKEL CHJ, 1977, PHILIPS RES REP, V32, P134

[10] MORPHOLOGICAL STABILITY ANALYSIS IN CHEMICAL VAPOR-DEPOSITION PROCESSES .1. [J].

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JANSEN, AK .

JOURNAL OF CRYSTAL GROWTH, 1978, 43 (03) :364-370

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