THE SURFACE CHARACTERIZATION OF THE ATMOSPHERIC CONTAMINATION OF HYDROGENATED AMORPHOUS-SILICON

被引：4

作者：

CHARENTON, JC

SACHER, E

MCINTYRE, NS

机构：

[1] ECOLE POLYTECH,DEPT GEN PHYS,COUCHES MINCES GRP,MONTREAL H3C 3A7,QUEBEC,CANADA

[2] UNIV WESTERN ONTARIO,FAC SCI,LONDON N6A 5B7,ONTARIO,CANADA

来源：

SOLAR ENERGY MATERIALS | 1988年 / 17卷 / 01期

关键词：

ARGON ION ETCHING - HYDROGENATED AMORPHOUS SILICON;

D O I：

10.1016/0165-1633(88)90033-0

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：17 / 23

页数：7

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