AN IMPROVED BORON-NITRIDE TECHNOLOGY FOR SYNCHROTRON X-RAY MASKS

被引：25

作者：

LEVY, RA ^{[1
]}

RESNICK, DJ ^{[1
]}

FRYE, RC ^{[1
]}

YANOF, AW ^{[1
]}

WELLS, GM ^{[1
]}

CERRINA, F ^{[1
]}

机构：

[1] UNIV WISCONSIN,CTR X-RAY LITHOG,MADISON,WI 53589

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.584035

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：154 / 161

页数：8

共 17 条

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