TRANSMISSION ELECTRON-MICROSCOPIC STUDY OF THE SURFACE AND INTERFACE OF CARBONIZED-LAYER SI(100)

被引：6

作者：

IWAMI, M

HIRAI, M

KUSAKA, M

YOKOTA, Y

MATSUNAMI, H

机构：

[1] OKAYAMA UNIV,MICROANAL RES CTR,OKAYAMA 700,JAPAN

[2] KYOTO UNIV,DEPT ELECT ENGN,KYOTO 606,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1989年 / 28卷 / 02期

关键词：

D O I：

10.1143/JJAP.28.L293

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：L293 / L295

页数：3

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