HIGH PRECISION ALIGNMENT PROCEDURE FOR AN ELLIPSOMETER

被引：19

作者：

ZEIDLER, JR ^{[1
]}

KOHLES, RB ^{[1
]}

BASHARA, NM ^{[1
]}

机构：

[1] UNIV NEBRASKA,COLL ENGN,ELECT MAT LAB,LINCOLN,NB 68508

来源：

APPLIED OPTICS | 1974年 / 13卷 / 05期

关键词：

D O I：

10.1364/AO.13.001115

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：1115 / 1120

页数：6

相关论文

共 20 条

[1] MEASUREMENT AND CORRECTION OF FIRST-ORDER ERRORS IN ELLIPSOMETRY
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) : 1077 - &
[2] GEOMETRICALLY EXACT ELLIPSOMETER ALIGNMENT
ASPNES, DE
STUDNA, AA
[J]. APPLIED OPTICS, 1971, 10 (05): : 1024 - &
[3] CHOICE OF COMPENSATOR AZIMUTH AND POSITION IN ELLIPSOMETRY
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (05) : 700 - &
[4] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) : 600 - &
[5] SPECIMEN COHERENT SCATTERING AND COMPENSATOR DEFECTS IN ELLIPSOMETRY
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (09) : 1236 - &
[6] ELLIPSOMETRY WITH IMPERFECT COMPONENTS INCLUDING INCOHERENT EFFECTS
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (10) : 1380 - &
[7] CALIBRATION OF ELLIPSOMETER DIVIDED CIRCLES
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) : 1118 - &
[8] BENNETT JU, TO BE PUBLISHED
[9] DINGHAM MJ, 1970, APPL OPTICS, V9, P1868
[10] FORGACS G, 1970, BRIT J APPL PHYS, V3, P1513