CHARACTERIZATION CONTROL AND USE OF DIELECTRIC CHARGE EFFECTS IN SILICON TECHNOLOGY

被引：17

作者：

SZEDON, JR

HANDY, RM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.1492613

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1 / +

页数：1

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