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ELECTRONIC PROPERTIES OF SI-SIO2 INTERFACE AS A FUNCTION OF OXIDE GROWTH CONDITIONS .2. FIXED CHARGE
被引:9
作者
:
PAUTRAT, JL
论文数:
0
引用数:
0
h-index:
0
PAUTRAT, JL
PFISTER, JC
论文数:
0
引用数:
0
h-index:
0
PFISTER, JC
机构
:
来源
:
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH
|
1972年
/ 11卷
/ 02期
关键词
:
D O I
:
10.1002/pssa.2210110230
中图分类号
:
T [工业技术];
学科分类号
:
08 ;
摘要
:
引用
收藏
页码:669 / &
相关论文
共 13 条
[1]
SYMMETRY OF INTERFACE CHARGE DISTRIBUTION IN THERMALLY OXIDIZED SILICON
[J].
ABOWITZ, G
论文数:
0
引用数:
0
h-index:
0
ABOWITZ, G
;
ARNOLD, E
论文数:
0
引用数:
0
h-index:
0
ARNOLD, E
;
LADELL, J
论文数:
0
引用数:
0
h-index:
0
LADELL, J
.
PHYSICAL REVIEW LETTERS,
1967,
18
(14)
:543
-+
[2]
CRYSTALLOGRAPHIC SYMMETRY OF SURFACE STATE DENSITY IN THERMALLY OXIDIZED SILICON
[J].
ARNOLD, E
论文数:
0
引用数:
0
h-index:
0
ARNOLD, E
;
LADELL, J
论文数:
0
引用数:
0
h-index:
0
LADELL, J
;
ABOWITZ, G
论文数:
0
引用数:
0
h-index:
0
ABOWITZ, G
.
APPLIED PHYSICS LETTERS,
1968,
13
(12)
:413
-+
[3]
GENERAL RELATIONSHIP FOR THERMAL OXIDATION OF SILICON
[J].
DEAL, BE
论文数:
0
引用数:
0
h-index:
0
DEAL, BE
;
GROVE, AS
论文数:
0
引用数:
0
h-index:
0
GROVE, AS
.
JOURNAL OF APPLIED PHYSICS,
1965,
36
(12)
:3770
-&
[4]
CHARACTERISTICS OF SURFACE-STATE CHARGE (QSS) OF THERMALLY OXIDIZED SILICON
[J].
DEAL, BE
论文数:
0
引用数:
0
h-index:
0
DEAL, BE
;
SKLAR, M
论文数:
0
引用数:
0
h-index:
0
SKLAR, M
;
GROVE, AS
论文数:
0
引用数:
0
h-index:
0
GROVE, AS
;
SNOW, EH
论文数:
0
引用数:
0
h-index:
0
SNOW, EH
.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1967,
114
(03)
:266
-+
[5]
DENSITY OF SIO2-SI INTERFACE STATES - (MOS DEVICES SI OXIDATION 100 DEGREES C O2 + 80 PPM H2O FERMI LEVEL E)
[J].
GRAY, PV
论文数:
0
引用数:
0
h-index:
0
GRAY, PV
;
BROWN, DM
论文数:
0
引用数:
0
h-index:
0
BROWN, DM
.
APPLIED PHYSICS LETTERS,
1966,
8
(02)
:31
-&
[6]
KOUZNETSOV FA, PRIVATE COMMUNICATIO
[7]
INFLUENCE OF DISSOLVED OXYGEN IN SIO2 ON C-V CHARACTERISTICS
[J].
KUBO, S
论文数:
0
引用数:
0
h-index:
0
KUBO, S
;
ICHINOHE, E
论文数:
0
引用数:
0
h-index:
0
ICHINOHE, E
.
JAPANESE JOURNAL OF APPLIED PHYSICS,
1967,
6
(09)
:1072
-+
[8]
HETEROJUNCTION PROPERTIES OF OXIDISED SEMICONDUCTOR
[J].
LINDMAYE.J
论文数:
0
引用数:
0
h-index:
0
LINDMAYE.J
.
SOLID-STATE ELECTRONICS,
1965,
8
(06)
:523
-&
[9]
WATER IN SILICA GLASS
[J].
MOULSON, AJ
论文数:
0
引用数:
0
h-index:
0
MOULSON, AJ
;
ROBERTS, JP
论文数:
0
引用数:
0
h-index:
0
ROBERTS, JP
.
TRANSACTIONS OF THE FARADAY SOCIETY,
1961,
57
(08)
:1208
-&
[10]
PAUTRAT JL, 1972, PHYS ST S-A, V11
←
1
2
→
共 13 条
[1]
SYMMETRY OF INTERFACE CHARGE DISTRIBUTION IN THERMALLY OXIDIZED SILICON
[J].
ABOWITZ, G
论文数:
0
引用数:
0
h-index:
0
ABOWITZ, G
;
ARNOLD, E
论文数:
0
引用数:
0
h-index:
0
ARNOLD, E
;
LADELL, J
论文数:
0
引用数:
0
h-index:
0
LADELL, J
.
PHYSICAL REVIEW LETTERS,
1967,
18
(14)
:543
-+
[2]
CRYSTALLOGRAPHIC SYMMETRY OF SURFACE STATE DENSITY IN THERMALLY OXIDIZED SILICON
[J].
ARNOLD, E
论文数:
0
引用数:
0
h-index:
0
ARNOLD, E
;
LADELL, J
论文数:
0
引用数:
0
h-index:
0
LADELL, J
;
ABOWITZ, G
论文数:
0
引用数:
0
h-index:
0
ABOWITZ, G
.
APPLIED PHYSICS LETTERS,
1968,
13
(12)
:413
-+
[3]
GENERAL RELATIONSHIP FOR THERMAL OXIDATION OF SILICON
[J].
DEAL, BE
论文数:
0
引用数:
0
h-index:
0
DEAL, BE
;
GROVE, AS
论文数:
0
引用数:
0
h-index:
0
GROVE, AS
.
JOURNAL OF APPLIED PHYSICS,
1965,
36
(12)
:3770
-&
[4]
CHARACTERISTICS OF SURFACE-STATE CHARGE (QSS) OF THERMALLY OXIDIZED SILICON
[J].
DEAL, BE
论文数:
0
引用数:
0
h-index:
0
DEAL, BE
;
SKLAR, M
论文数:
0
引用数:
0
h-index:
0
SKLAR, M
;
GROVE, AS
论文数:
0
引用数:
0
h-index:
0
GROVE, AS
;
SNOW, EH
论文数:
0
引用数:
0
h-index:
0
SNOW, EH
.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1967,
114
(03)
:266
-+
[5]
DENSITY OF SIO2-SI INTERFACE STATES - (MOS DEVICES SI OXIDATION 100 DEGREES C O2 + 80 PPM H2O FERMI LEVEL E)
[J].
GRAY, PV
论文数:
0
引用数:
0
h-index:
0
GRAY, PV
;
BROWN, DM
论文数:
0
引用数:
0
h-index:
0
BROWN, DM
.
APPLIED PHYSICS LETTERS,
1966,
8
(02)
:31
-&
[6]
KOUZNETSOV FA, PRIVATE COMMUNICATIO
[7]
INFLUENCE OF DISSOLVED OXYGEN IN SIO2 ON C-V CHARACTERISTICS
[J].
KUBO, S
论文数:
0
引用数:
0
h-index:
0
KUBO, S
;
ICHINOHE, E
论文数:
0
引用数:
0
h-index:
0
ICHINOHE, E
.
JAPANESE JOURNAL OF APPLIED PHYSICS,
1967,
6
(09)
:1072
-+
[8]
HETEROJUNCTION PROPERTIES OF OXIDISED SEMICONDUCTOR
[J].
LINDMAYE.J
论文数:
0
引用数:
0
h-index:
0
LINDMAYE.J
.
SOLID-STATE ELECTRONICS,
1965,
8
(06)
:523
-&
[9]
WATER IN SILICA GLASS
[J].
MOULSON, AJ
论文数:
0
引用数:
0
h-index:
0
MOULSON, AJ
;
ROBERTS, JP
论文数:
0
引用数:
0
h-index:
0
ROBERTS, JP
.
TRANSACTIONS OF THE FARADAY SOCIETY,
1961,
57
(08)
:1208
-&
[10]
PAUTRAT JL, 1972, PHYS ST S-A, V11
←
1
2
→