PLASMA OXIDATION OF SILICON

被引：38

作者：

MORUZZI, JL

KIERMASZ, A

ECCLESTON, W

机构：

来源：

PLASMA PHYSICS AND CONTROLLED FUSION | 1982年 / 24卷 / 06期

关键词：

D O I：

10.1088/0032-1028/24/6/003

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

引用

页码：605 / 614

页数：10

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