WET CHEMICAL ETCHING FOR ULTRAFINE PERIODIC STRUCTURE - RECTANGULAR INP CORRUGATIONS OF 70-NM PITCH AND 100-NM DEPTH

被引：26

作者：

INAMURA, E ^{[1
]}

MIYAMOTO, Y ^{[1
]}

TAMURA, S ^{[1
]}

TAKASUGI, T ^{[1
]}

FURUYA, K ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,DEPT PHYS ELECTR,MEGURO KU,TOKYO 152,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 10期

关键词：

D O I：

10.1143/JJAP.28.2193

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2193 / 2196

页数：4

共 11 条

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