RHEED and AFM studies of homoepitaxial diamond thin film on C(001) substrate produced by microwave plasma CVD

被引：10

作者：

Takami, T

Suzuki, K

Kusunoki, I

Sakaguchi, I

Nishitani-Gamo, M

Ando, T

机构：

[1] Tohoku Univ, Sci Measurements Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan

[2] Natl Inst Res Inorgan Mat, Japan Sci & Technol Corp, Core Res Evolut Sci & Technol, Tsukuba, Ibaraki 3050044, Japan

来源：

关键词：

atomic force microscopy; CVD; homoepitaxy; reflection high-energy electron diffraction;

D O I：

10.1016/S0925-9635(98)00391-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A surface of a diamond thin film grown homoepitaxially on a C(001) substrate by microwave plasma chemical vapor deposition (CVD) has been studied using reflection high-energy electron diffraction (RHEED) and atomic force microscopy (AFM). The RHEED pattern showed the C(001)2 x 1/1 x2 double-domain structure. The AFM images taken from the same sample in air showed 1 x 1 but locally 2 x 1 structure, which was confirmed by the Fourier transformed pattern of the AFM image. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：701 / 704

页数：4

共 32 条

[21] EPITAXIAL-GROWTH OF HIGH-QUALITY DIAMOND FILM BY THE MICROWAVE PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION METHOD [J].

SHIOMI, H ;

TANABE, K ;

NISHIBAYASHI, Y ;

FUJIMORI, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (01) :34-40

[22] Atomic structure of the diamond (100) surface studied using scanning tunneling microscopy [J].

Stallcup, RE ;

Villarreal, LM ;

Lim, SC ;

Akwani, I ;

Aviles, AF ;

Perez, JM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (02) :929-932

[23] True atomic resolution imaging with noncontact atomic force microscopy [J].

Sugawara, Y ;

Ueyama, H ;

Uchihashi, T ;

Ohta, M ;

Morita, S ;

Suzuki, M ;

Mishima, S .

APPLIED SURFACE SCIENCE, 1997, 113 :364-370

[24] DEFECT MOTION ON AN INP(110) SURFACE OBSERVED WITH NONCONTACT ATOMIC-FORCE MICROSCOPY [J].

SUGAWARA, Y ;

OHTA, M ;

UEYAMA, H ;

MORITA, S .

SCIENCE, 1995, 270 (5242) :1646-1648

[25] NANOMETER-SCALE MORPHOLOGY OF HOMOEPITAXIAL DIAMOND FILMS BY ATOMIC FORCE MICROSCOPY [J].

SUTCU, LF ;

THOMPSON, MS ;

CHU, CJ ;

HAUGE, RH ;

MARGRAVE, JL ;

DEVELYN, MP .

APPLIED PHYSICS LETTERS, 1992, 60 (14) :1685-1687

[26]

TAKAMI T, UNPUB

[27] DIAMOND(001) SINGLE-DOMAIN 2X1 SURFACE GROWN BY CHEMICAL-VAPOR-DEPOSITION [J].

TSUNO, T ;

TOMIKAWA, T ;

SHIKATA, S ;

IMAI, T ;

FUJIMORI, N .

APPLIED PHYSICS LETTERS, 1994, 64 (05) :572-574

[28] EPITAXIALLY GROWN DIAMOND (001) 2X1/1X2 SURFACE INVESTIGATED BY SCANNING TUNNELING MICROSCOPY IN AIR [J].

TSUNO, T ;

IMAI, T ;

NISHIBAYASHI, Y ;

HAMADA, K ;

FUJIMORI, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (05) :1063-1066

[29] TWINNING STRUCTURE AND GROWTH HILLOCK ON DIAMOND (001) EPITAXIAL FILM [J].

TSUNO, T ;

IMAI, T ;

FUJIMORI, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (7A) :4039-4043

[30] SCANNING-TUNNELING-MICROSCOPY MORPHOLOGICAL-STUDY OF THE 1ST STAGES OF GROWTH OF MICROWAVE CHEMICAL-VAPOR-DEPOSITED THIN DIAMOND FILMS [J].

VAZQUEZ, L ;

SANCHEZ, O ;

ALBELLA, JM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (01) :1-7

← 1 2 3 4 →