Full simulations of the apertureless scanning near field optical microscopy signal: achievable resolution and contrast

被引:37
作者
Esteban, R. [1 ,2 ]
Vogelgesang, R. [1 ]
Kern, K. [1 ,3 ]
机构
[1] Max Planck Inst Festkorperforsch, D-70569 Stuttgart, Germany
[2] Inst Opt Grad Sch, F-91127 Palaiseau, France
[3] Ecole Polytech Fed Lausanne, Inst Phys Nanostruct, CH-1015 Lausanne, Switzerland
来源
OPTICS EXPRESS | 2009年 / 17卷 / 04期
关键词
EVANESCENT-WAVE SCATTERING; LOCK-IN DETECTION; NANOSCALE RESOLUTION; SUBWAVELENGTH-SCALE; ATOMIC-RESOLUTION; FORCE MICROSCOPY; NANOMETER-SCALE; TIP VIBRATION; FAR FIELDS; SURFACE;
D O I
10.1364/OE.17.002518
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We simulate apertureless near-field optical imaging and obtain phase and amplitude scans of structured substrates for elastic scattering. The solution of the three-dimensional Maxwell equations does not involve approximations and we include large tips and substrates, strong interaction, interferometric detection and demodulation at higher harmonics. Such modeling represents a significant step towards quantitative simulations and offers the attractive possibility to study the individual influence of each relevant experimental parameter. We typically obtain highly localized signatures of the interaction of the tip with gold inclusions, superposed on a slowly varying background signal. The relative importance of both contributions and the achievable lateral resolution are strongly dependent on the geometry and scanning conditions. The simulations show sensitivity mostly to the first nanometers of the sample and underline the importance of scanning near the sample and being careful with mechanical anharmonicities on the tip oscillation. They also help to determine the influence of oscillation amplitude and demodulation harmonic. (C) 2008 Optical Society of America
引用
收藏
页码:2518 / 2529
页数:12
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