Nitrogen incorporation kinetics in metalorganic molecular beam epitaxy of GaAsN

被引:21
作者
Jin, C [1 ]
Qiu, Y [1 ]
Nikishin, SA [1 ]
Temkin, H [1 ]
机构
[1] Texas Tech Univ, Dept Elect Engn, Lubbock, TX 79409 USA
关键词
D O I
10.1063/1.124138
中图分类号
O59 [应用物理学];
学科分类号
摘要
Epitaxial layers of GaAsN were grown on GaAs by metalorganic molecular beam epitaxy using dimethylhydrazine, triethylgallium, and conventional arsenic sources. The nitrogen incorporation in GaAsN was studied by varying the arsenic and gallium fluxes, at growth temperatures between 430 and 500 degrees C. The nitrogen incorporation kinetics and growth mechanism have been modeled by assuming formation of an adduct of trimethylgallium and dimethylhydrazine. The model accounts for experimentally observed relationships between growth rates and incorporation of N into GaAsN, fluxes of Ga, As, and N, and the growth temperature. (C) 1999 American Institute of Physics. [S0003-6951(99)03122-8].
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页码:3516 / 3518
页数:3
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