Atomic-scale nature of the (3x3)-ordered GaAs(001):N surface prepared by plasma-assisted molecular-beam epitaxy

被引:41
作者
Gwo, S
Tokumoto, H
Miwa, S
机构
[1] NATL INST ADV INTERDISCIPLINARY RES,JOINT RES CTR ATOM TECHNOL,TSUKUBA,IBARAKI 305,JAPAN
[2] ANGSTROM TECHNOL PARTNERSHIP,JOINT RES CTR ATOM TECHNOL,TSUKUBA,IBARAKI 305,JAPAN
关键词
D O I
10.1063/1.119538
中图分类号
O59 [应用物理学];
学科分类号
摘要
In situ scanning tunneling microscopy and time-resolved reflection high-energy electron diffraction measurements were performed to study the nitridation process of the As-terminated GaAs(001)-(2x4) surface by using electron cyclotron resonance plasma-assisted molecular-beam epitaxy. We report the real-space atomic structure of the coherently strained (3x3)-ordered GaN monolayer on GaAs(001) after a limited-exposure nitridation process and the atomically smooth morphology of this nitrided surface. The unique (3x3) phase is found consisting of nitrogen dimers and a regular array of missing nitrogen rows in both [<(1)over bar 10>] and [110] directions. (C) 1997 American Institute of Physics.
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收藏
页码:362 / 364
页数:3
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